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YH2M8155 keturių ašių tikslumo vienpusio šlifavimo (poliravimo) staklės
Pagrindinė funkcija:
This machine is used for metal parts such as valve plate, valve plate, friction plate, rigid sealing ring, cylinder piston ring, oil pump blade, as well as non-metallic hard and brittle materials such as silicon wafer, wafer, quartz crystal, glass, ceramic and sapphire. Surface grinding and polishing.
Kategorija: Produktų centras
Raktažodžiai: Yuhuan
Įprastos apdirbtos dalys
Silicon Wafer
safyras
Įrangos akcentai
● This machine adopts eccentric planetary motion.
● The workpiece plate and polishing plate are directly driven by the reducer, and the speed is adjusted by the frequency converter.
● Adopt air cylinder + electric proportional valve to precisely control the pressure, adopt touch screen + PLC control mode.
Techninis parametras
Projektas | Vienetas | Parametras |
| Precision bottom plate size | mm | 1422 x 145 |
Platen size and material | mm | φ550/SUS304 flatness≤5um |
įrangos svoris | T | 9 |
Device size (L*W*H) | mm | X X 2255 1875 3300 |
Panel temperature detection system | - | turėti |
Polishing liquid supply system | - | turėti |
PP head cooling system | - | Neprivalomas |
Bottom plate cooling system | - | turėti |
Upper platen motor forced rotation (upper drive) 4 sets | - | turėti |
Turning tool servo system | - | Neprivalomas |
Full process control system | - | Possess/can write 10-step process (50recipe) |
Historical data storage and reading system (temperature, speed, time, pressure) | - | turėti |
Water Guns and Air Guns | - | turėti |
Upper platen pressure and accuracy | - | The maximum pressure of a single platen is 500kg/ea, the minimum pressure is 40kg/ea, and the pressure fluctuation and error are within 3% |
Taikomas maitinimo šaltinis | - | Power supply voltage: 380V±10%/220V±10%, power supply frequency: 50Hz±2% |
equipment power | kW | ≦ 30 |
Oro slėgio reikalavimas | Mpa | End pressure: 0.5～0.7 |
cooling water requirement | - | Pressure: 2-4kg/cm2, flow: 10-16L/min. Temperature: 8-18℃ |
aplinkos poreikiai | - | Aplinkos temperatūra: 0℃-45℃ |
