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YH2M8155 Véier-Achs Präzisioun Single-dofir Schleifen (poléieren) Machine
Haaptfunktioun:
This machine is used for metal parts such as valve plate, valve plate, friction plate, rigid sealing ring, cylinder piston ring, oil pump blade, as well as non-metallic hard and brittle materials such as silicon wafer, wafer, quartz crystal, glass, ceramic and sapphire. Surface grinding and polishing.
Kategorie: Produit Center
Schlësselwieder: Yuhuan
Typesch Machined Parts
Silicon Wafer
Saphir
Ausrüstung Highlights
● This machine adopts eccentric planetary motion.
● The workpiece plate and polishing plate are directly driven by the reducer, and the speed is adjusted by the frequency converter.
● Adopt air cylinder + electric proportional valve to precisely control the pressure, adopt touch screen + PLC control mode.
Technesch Parameter
Projet | Eenheet | Parameter |
| Precision bottom plate size | mm | 1422 x 145 |
Platen size and material | mm | φ550/SUS304 flatness≤5um |
Equipement Gewiicht | T | 9 |
Device size (L*W*H) | mm | X x 2255 1875 3300 |
Panel temperature detection system | - | hunn |
Polishing liquid supply system | - | hunn |
PP head cooling system | - | optional |
Bottom plate cooling system | - | hunn |
Upper platen motor forced rotation (upper drive) 4 sets | - | hunn |
Turning tool servo system | - | optional |
Full process control system | - | Possess/can write 10-step process (50recipe) |
Historical data storage and reading system (temperature, speed, time, pressure) | - | hunn |
Water Guns and Air Guns | - | hunn |
Upper platen pressure and accuracy | - | The maximum pressure of a single platen is 500kg/ea, the minimum pressure is 40kg/ea, and the pressure fluctuation and error are within 3% |
Applicabel Energieversuergung | - | Power supply voltage: 380V±10%/220V±10%, power supply frequency: 50Hz±2% |
Equipement Muecht | kW | ≦ 30 |
Air pressure requirement | Mpa | End pressure: 0.5～0.7 |
cooling water requirement | - | Pressure: 2-4kg/cm2, flow: 10-16L/min. Temperature: 8-18℃ |
environmental needs | - | Ëmfeld Temperatur: 0 ℃-45 ℃ |
