YH2M8155 XNUMX軸精密片面研削(研磨)機
主な機能:
This machine is used for metal parts such as valve plate, valve plate, friction plate, rigid sealing ring, cylinder piston ring, oil pump blade, as well as non-metallic hard and brittle materials such as silicon wafer, wafer, quartz crystal, glass, ceramic and sapphire. Surface grinding and polishing.
カテゴリ: 製品センター
キーワード: 玉環
代表的な機械加工部品
シリコンウェーハ
サファイア
機器のハイライト
● This machine adopts eccentric planetary motion.
● The workpiece plate and polishing plate are directly driven by the reducer, and the speed is adjusted by the frequency converter.
● Adopt air cylinder + electric proportional valve to precisely control the pressure, adopt touch screen + PLC control mode.
技術的なパラメータ
プロジェクト | ユニット |
|
Precision bottom plate size | mm | φ1422×145 |
Platen size and material | mm | φ550/SUS304 flatness≤5um |
機器の重量 | T | 9 |
Device size (L*W*H) | mm | 2255のx 1875のx 3300 |
Panel temperature detection system | - | 持ってる |
Polishing liquid supply system | - | 持ってる |
PP head cooling system | - | オプション |
Bottom plate cooling system | - | 持ってる |
Upper platen motor forced rotation (upper drive) 4 sets | - | 持ってる |
Turning tool servo system | - | オプション |
Full process control system | - | Possess/can write 10-step process (50recipe) |
Historical data storage and reading system (temperature, speed, time, pressure) | - | 持ってる |
Water Guns and Air Guns | - | 持ってる |
Upper platen pressure and accuracy | - | The maximum pressure of a single platen is 500kg/ea, the minimum pressure is 40kg/ea, and the pressure fluctuation and error are within 3% |
該当する電源 | - | Power supply voltage: 380V±10%/220V±10%, power supply frequency: 50Hz±2% |
機器の電力 | kW | ≦30 |
空気圧要求 | MPA | End pressure: 0.5~0.7 |
cooling water requirement | - | Pressure: 2-4kg/cm2, flow: 10-16L/min. Temperature: 8-18℃ |
環境ニーズ | - | 周囲温度:0℃〜45℃ |