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YHM7430High-precision vertical single-sided grinding machine
主な機能：
This machine tool is an automatic, high-efficiency machine tool, suitable for batch processing of parts, mainly used for single-sided grinding parts plane, the use of CBN grinding wheel, diamond grinding wheel for sapphire, glass, ceramics, semiconductors and other metal and non-metallic hard and brittle materials for efficient precision single-sided grinding and thinning processing; It can be widely used for single-sided grinding and thin processing of LED sapphire substrates, semiconductors and other products.
カテゴリ: 製品センター
キーワード: 玉環
代表的な機械加工部品
サファイア
ガラス
セラミックス
シリコンウェーハ
機器のハイライト
● The machine tool adopts IN-FEED feed grinding theory, the servo motor drives the grinding wheel to move vertically, and the lower disk is driven by servo and synchronous belt, which can rotate in the same direction or opposite direction with the grinding wheel according to the needs of the process.
● This machine tool adopts precision cross roller bearing + deep groove ball bearing to support the workpiece spindle, which has high rigidity and precision; Vacuum adsorption method is used for clamping
Tooling or workpiece.
● The grinding head adopts an electric spindle to drive the grinding wheel to rotate, and adopts the classic screw + line rail + servo motor mode to drive vertical feed; The Z-axis adopts high-precision grating closed-loop feedback to control the Z-axis feed accuracy.
● The use of dual probe measuring instrument Marposs D-Model+2Unimar can achieve precise control of the grinding thickness dimensional error of the workpiece.
● Adopt interactive man-machine interface (touch screen), precise control and simple to use.
技術的なパラメータ
| プロジェクト | ユニット | ||
| 砥石径 | mm | Φ380 | |
| 加工部品 | 最大外径 | mm | Φ300 |
| Electrospindle spindle | 回転速度 | R /分 | 100-250 |
| 出力 | kW | 11 | |
| Z Shaft | 旅程 | mm | 125 |
| 出力 | kW | 0.4 | |
| 最小入力ユニット | mm | 0.001 | |
| 速く動く | ミリメートル/分 | 400 | |
| 最大フィード | mm / s | 5 | |
| 最小解像度 | um | 0.1 | |
| ワークベンチ | 送りストローク | mm | 400 |
| 速く動く | m / min | 10 | |
| 回転速度 | R /分 | 5-350 | |
| Measure repeatability online | um | ±0.5 | |
| In-line thickness measurement resolution | um | 0.1 | |
| 加工精度 | TTV monolithic | um | 3 |
| TTV sheet to piece | um | ±3 | |
| 総重量 | kg | 2100 | |
