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13B-9L/8432C/8432E/8436B/18B/22B High Precision Vertical Double Sided Grinding (Polishing) Machine Series
主な機能：
This series of equipment is mainly used for simultaneous grinding of the upper and lower parallel end faces of thin precision parts of non-metallic and metallic hard and brittle materials such as silicon wafers, sapphire crystals, ceramic wafers, optical glass, quartz crystals, mobile phone screen glass, semiconductor materials, etc. and polished.
カテゴリ: 製品センター
キーワード: 玉環
代表的な機械加工部品
シリコンウェーハ
サファイア
携帯電話ガラス
機器のハイライト
● This series of machine tools belong to 4 planetary annular polishing motions.
● It adopts the lifting method of the inner gear cam mechanism and is equipped with a safety self-locking cylinder device.
● The sun gear, the lower plate, the upper plate and the ring gear are driven by the gear pair + reducer transmission mode, and the speed is adjusted by frequency conversion.
● Adopt air cylinder + electric proportional valve to control loading pressure, adopt touch screen + PLC control mode.
技術的なパラメータ
プロジェクト | ユニット | YH2M13B-9L | YH2M8432C | YH2M8432E | YH2M8436B | YH2M18B | YH2M22B |
Grinding disc size (outer diameter x inner diameter x thickness) | mm | φ978x φ558×45 | φ1070x φ495×45 | φ1070x φ495×45 | φ1140x φ375×45 | φ1280x φ449×50 | φ1462x φ494×50 |
Planetary Gear Specifications | DP = 12 Z = 108 | P = 15.875 Z = 64 | P = 16.842 Z = 60 | P = 15.875 Z = 84 | P = 21.053 Z = 71 | M=3 Z=184 | |
Place the number of planetary gears | n | 3≦n≦9 | 3≦n≦7 | 3≦n≦7 | 3≦n≦5 | 3≦n≦5 | 3≦n≦5 |
ワークの最大サイズ | mm | φ180 （対角線） | φ280 （対角線） | φ280 （対角線） | φ360 （対角線） | φ420 （対角線） | φ480 （対角線） |
ワークの最小厚さ | mm | 0.4 | 0.6 | 0.3 | |||
Abrasive flatness | mm | 0.006(φ100) | |||||
Polished flatness | mm | 0.008(φ100) | |||||
Abrasive surface roughness | ミクロン | Ra0.15 | 0.04 | ||||
Surface roughness of polished parts | ミクロン | Ra0.05 | |||||
寸法 (Approx: LxWxH) | mm | 1650x1300 x2650 | 1510x1450 x2650 | 1800x1500 x2650 | 2200x1750 x2690 | 3800x3300 x3600 | |
| Overall weight (approx.) | kg | 2600 | 3500 | 3200 | 3000 | 5000 | 11000 |
