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YHJART325 High Precision Air Float Turntable
主な機能：
It is used as a rotary table part of precision machine tools. Its high precision and clean characteristics are especially suitable for use in ultra-finishing machine tools in the semiconductor industry.
カテゴリ: 製品センター
キーワード: 玉環
主な特徴
●高精度
Due to the error equalization effect of the air-floating turntable, it can achieve the accuracy that cannot be achieved by traditional mechanical turntables.
● Low friction
Since there is no direct contact between the bearing and the turntable shaft, the friction is small and the response to the motor is more timely
●クリーン
The air flotation turntable is lubricated by gas, so there is no need to consider the leakage of lubricating fluid, and it is clean during use
● High stiffness
In this bearing, the designed axial stiffness reaches 1200N/μm, and the radial stiffness reaches 260N/μm
技術的なパラメータ
| プロジェクト | ||
| 標準版 | アップグレード版 | |
| ワーキングデスクサイズ | Φ325mm | |
| 最大荷重 | 2000N | |
| 定格速度 | 100RPM | |
| 定格トルク | 19Nm | |
| radial stiffness | 260N/Чm | |
| Axial stiffness | 1200N/Чm | |
| Maximum allowable partial load (2000N full load) | 60Nm | |
| Maximum allowable eccentric load (no load) | 45Nm | |
| 給気圧力 | 0.5±0.05MPa | |
| Axial runout error | 1Чm | 0.2Чm |
| Radial runout error | 1.5Чm | 0.5Чm |
| 精密な位置決め | 10rad s | 3rad s |
| 再現性 | 4rad s | 1.5rad s |
