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13B-9L/8432C/8432E/8436B/18B/22B High Precision Vertical Double Sided Grinding (Polishing) Machine Series
Main Function:
This series of equipment is mainly used for simultaneous grinding of the upper and lower parallel end faces of thin precision parts of non-metallic and metallic hard and brittle materials such as silicon wafers, sapphire crystals, ceramic wafers, optical glass, quartz crystals, mobile phone screen glass, semiconductor materials, etc. and polished.
Category: Product Center
Keywords: Yuhuan
Typical Machined Parts
Silicon Wafer
Sapphire
Mobile Phone Glass
Equipment Highlights
● This series of machine tools belong to 4 planetary annular polishing motions.
● It adopts the lifting method of the inner gear cam mechanism and is equipped with a safety self-locking cylinder device.
● The sun gear, the lower plate, the upper plate and the ring gear are driven by the gear pair + reducer transmission mode, and the speed is adjusted by frequency conversion.
● Adopt air cylinder + electric proportional valve to control loading pressure, adopt touch screen + PLC control mode.
Technical Parameter
Project | Unit | YH2M13B-9L | YH2M8432C | YH2M8432E | YH2M8436B | YH2M18B | YH2M22B |
Grinding disc size (outer diameter x inner diameter x thickness) | mm | φ978x φ558x45 | φ1070x φ495x45 | φ1070x φ495x45 | φ1140x φ375x45 | φ1280x φ449x50 | φ1462x φ494x50 |
Planetary Gear Specifications | DP=12 Z=108 | P=15.875 Z=64 | P=16.842 Z=60 | P=15.875 Z=84 | P=21.053 Z=71 | M=3 Z=184 | |
Place the number of planetary gears | n | 3≤n≤9 | 3≤n≤7 | 3≤n≤7 | 3≤n≤5 | 3≤n≤5 | 3≤n≤5 |
Maximum size of workpiece | mm | φ180 (diagonal) | φ280 (diagonal) | φ280 (diagonal) | φ360 (diagonal) | φ420 (diagonal) | φ480 (diagonal) |
Minimum thickness of workpiece | mm | 0.4 | 0.6 | 0.3 | |||
Abrasive flatness | mm | 0.006(φ100) | |||||
Polished flatness | mm | 0.008(φ100) | |||||
Abrasive surface roughness | μm | Ra0.15 | 0.04 | ||||
Surface roughness of polished parts | μm | Ra0.05 | |||||
Dimensions (Approx: LxWxH) | mm | 1650x1300 x2650 | 1510x1450 x2650 | 1800x1500 x2650 | 2200x1750 x2690 | 3800x3300 x3600 | |
| Overall weight (approx.) | kg | 2600 | 3500 | 3200 | 3000 | 5000 | 11000 |
