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YHJART325 High Precision Air Float Turntable
YHJART325 High Precision Air Float Turntable
YHJART325 High Precision Air Float Turntable

YHJART325 High Precision Air Float Turntable


Main Function:

It is used as a rotary table part of precision machine tools. Its high precision and clean characteristics are especially suitable for use in ultra-finishing machine tools in the semiconductor industry.


Category: Product Center
Keywords: Yuhuan

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Main Feature

● High precision

Due to the error equalization effect of the air-floating turntable, it can achieve the accuracy that cannot be achieved by traditional mechanical turntables.

● Low friction

Since there is no direct contact between the bearing and the turntable shaft, the friction is small and the response to the motor is more timely

● Clean

The air flotation turntable is lubricated by gas, so there is no need to consider the leakage of lubricating fluid, and it is clean during use

● High stiffness

In this bearing, the designed axial stiffness reaches 1200N/μm, and the radial stiffness reaches 260N/μm

Technical Parameter
ProjectParameter
Standard EditionUpgraded Version
working desk size

Φ325mm

maximum load2000N
Rated speed100RPM
Rated torque

19Nm

radial stiffness260N/Чm
Axial stiffness1200N/Чm
Maximum allowable partial load (2000N full load)60Nm
Maximum allowable eccentric load (no load)45Nm
Air supply pressure0.5±0.05Mpa
Axial runout error1Чm0.2Чm
Radial runout error1.5Чm0.5Чm
Precise positioning10rad s3rad s
Repeatability4rad s1.5rad s

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